Gapless microlens array and method of fabrication

ABSTRACT

A microlens array with reduced or no empty space between individual microlenses and a method for forming the same. The microlens array is formed by patterning a first set of microlens precursors in a checkerboard pattern on a substrate. The first set of microlens precursors is reflowed and cured into first microlenses impervious to subsequent reflows. Then, a second set of microlens precursors is patterned in spaces among the first microlenses, reflowed and cured into second microlenses. The reflows and cures can be conducted under different conditions, and the microlenses may be differently sized. The conditions of the reflows can be chosen to ensure that the focal lengths of microlenses are optimized for maximum sensor signal.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation in-part of application Ser. No.10/681,308, filed Oct. 9, 2003, and application Ser. No. 11/002,231,filed on Dec. 3, 2004, which are hereby incorporated by reference.

FIELD OF THE INVENTION

The invention relates generally to imaging devices and, moreparticularly to an array of microlenses used to focus light onphotosensors of shared pixel cells, and the method of making said array.

BACKGROUND OF THE INVENTION

Imaging devices, including charge coupled devices (CCD) andcomplementary metal oxide semiconductor (CMOS) sensors have commonlybeen used in photo-imaging applications. A CMOS imager circuit includesa focal plane array of pixel cells, each one of the cells including aphotosensor, for example, a photogate, photoconductor or a photodiodefor accumulating photo-generated charge in the specified portion of thesubstrate. Each pixel cell has a charge storage region, formed on or inthe substrate, which is connected to the gate of an output transistorthat is part of a readout circuit. The charge storage region may beconstructed as a floating diffusion region. In some imager circuits,each pixel may include at least one electronic device such as atransistor for transferring charge from the photosensor to the storageregion and one device, also typically a transistor, for resetting thestorage region to a predetermined charge level prior to chargetransference.

In a CMOS imager, the active elements of a pixel cell perform thefunctions of: (1) photon to charge conversion; (2) accumulation of imagecharge; (3) resetting the storage region to a known state; (4) transferof charge to the storage region; (5) selection of a pixel for readout;and (6) output and amplification of signals representing pixel resetlevel and pixel charge. Photo charge may be amplified when it moves fromthe initial charge accumulation region to the storage region. The chargeat the storage region is typically converted to a pixel output voltageby a source follower output transistor.

Exemplary CMOS imaging circuits, processing steps thereof, and detaileddescriptions of the functions of various CMOS elements of an imagingcircuit are described, for example, in U.S. Pat. No. 6,140,630; U.S.Pat. No. 6,376,868; U.S. Pat. No. 6,310,366; U.S. Pat. No. 6,326,652;U.S. Pat. No. 6,204,524; U.S. Pat. No. 6,333,205; and U.S. Pat. No.6,852,591, all of which are assigned to Micron Technology, Inc. Thedisclosures of each of the foregoing are hereby incorporated byreference in their entirety.

The use of microlenses significantly improves the photosensitivity ofthe imaging device by collecting light from a large light collectingarea and focusing it onto a small photosensitive area of thephotosensor. As the size of imager arrays and photosensitive regions ofpixels continue to decrease, it becomes increasingly difficult toprovide a microlens capable of focusing incident light rays onto thephotosensitive regions of the pixel cell. This problem is due in part tothe increased difficulty in constructing a microlens that has theoptimal focal characteristics for the increasingly smaller imagerdevice. Microlens shaping during fabrication is important for optimizingthe focal point of a microlens. This in turn increases the quantumefficiency for the underlying pixel array. Utilizing a sphericalmicrolens shape is better for focusing incoming light onto a narrowfocal point, which allows for the desired decrease in photosensor size.Spherical microlenses, however, suffer from gapping problems which areundesirable as described below.

Microlenses may be formed through an additive process. In conventionaladditive microlens fabrication, an intermediate lens material isdeposited in an array onto a substrate and formed into a microlens arrayusing a reflow process. Each microlens is formed with a minimumdistance, typically no less than 0.3 microns, between adjacentmicrolenses. Any closer than 0.3 micrometers may cause two neighboringmicrolenses to bridge during reflow. In the known process, eachmicrolens is patterned in a material layer as a single square with gapsaround it. During reflow of the patterned square microlens material, agel drop is formed in a partially spherical shape driven by the forceequilibrium of surface tension and gravity. The microlenses then hardenin this shape. If the gap between two adjacent gel drops is too narrow,they may touch and merge, or bridge, into one larger drop. Bridgingchanges the shape of the lenses, which leads to a change in focallength, or more precisely the energy distribution in the focal range. Achange in the energy distribution in the focal range leads to a loss inquantum efficiency of, and enhanced cross-talk between, pixels.

The problem of bridging is exacerbated by the recently proposed sharedpixel cell architecture. For example, U.S. patent application Ser. No.11/126,275, assigned to Micron Technology, Inc., the full disclosure ofwhich is hereby incorporated, illustrates two-way and four-way pixelcells. Due to the proximity of the photosensors in shared pixel cellarchitecture and non-uniform photosensor spacing and/or sizes, thefabrication of microlenses over the photosensors is more prone tobridging.

Accordingly, it is desirable to form a microlens array over a pixel cellarray having non-uniformly spaced photosensors and/or non-uniformphotosensor sizes, such as, for example, photosensors employed in arrayshaving a shared pixel cell architecture. It is also desirable to form amicrolens array having minimized gapping between the microlenses withoutcausing bridging during the microlens fabrication reflow process.

BRIEF SUMMARY OF THE INVENTION

An exemplary embodiment of the invention relates to a microlens arrayformed over a pixel cell array having at least three pixel cellsnon-uniformly spaced from each other. A further exemplary embodiment ofthe microlens array relates to microlenses that have a shifted focalpoint such that photon radiation is directed towards a photosensitiveportion of asymmetrically formed photosensors.

BRIEF DESCRIPTION OF THE DRAWINGS

The above-described features and advantages of the invention will bemore clearly understood from the following detailed description, whichis provided with reference to the accompanying drawings in which:

FIG. 1 illustrates a partial cross-sectional view of asemiconductor-based imager constructed in accordance with an exemplaryembodiment of the invention;

FIG. 2 illustrates a partial top-down view of the FIG. 1 pixel cellarray;

FIGS. 3-6 illustrate an exemplary method of fabricating the FIG. 1imager;

FIG. 7 is a flow diagram illustrating an exemplary method of fabricatingthe FIG. 1 imager;

FIG. 8 illustrates a partial top-down view of a pixel cell arrayconstructed in accordance with a second exemplary embodiment of theinvention;

FIG. 9 is a block diagram of an imaging device incorporating the imagerconstructed in accordance with FIG. 1; and

FIG. 10 is a schematic diagram of a processor system incorporating theFIG. 9 imaging device in accordance with an exemplary embodiment of theinvention.

DETAILED DESCRIPTION OF THE INVENTION

In the following detailed description, reference is made to theaccompanying drawings, which form a part hereof and show by way ofillustration specific embodiments in which the invention may bepracticed. These embodiments are described in sufficient detail toenable those skilled in the art to practice the invention, and it is tobe understood that other embodiments may be utilized, and thatstructural, logical, and electrical changes may be made withoutdeparting from the spirit and scope of the present invention. Theprogression of processing steps described is exemplary of embodiments ofthe invention; however, the sequence of steps is not limited to that setforth herein and may be changed as is known in the art, with theexception of steps necessarily occurring in a certain order.

As used herein, the terms “semiconductor substrate” and “substrate” areto be understood to include any semiconductor-based structure. Thesemiconductor structure should be understood to include silicon,silicon-on-insulator (SOI), silicon-on-sapphire (SOS),silicon-germanium, doped and undoped semiconductors, epitaxial layers ofsilicon supported by a base semiconductor foundation, and othersemiconductor structures. The semiconductor need not be silicon-based.The semiconductor could be other semiconductors including, for example,germanium or gallium arsenide. When reference is made to thesemiconductor substrate in the following description, previous processsteps may have been utilized to form regions or junctions in or over thebase semiconductor or foundation.

The term “pixel cell,” as used herein, refers to a photo-element unitcell containing a photosensor for converting photons to an electricalsignal as may be employed by an imager device. Although the pixel cellsare illustrated herein as CMOS four-transistor (or 4-T) pixel cells, itis not intended to be limiting in any way. For example, the pixel cellscould have more or less than four transistors and the invention may beemployed in any type of solid state imager.

The term “substantially gapless” is intended to cover not only microlensarrays having zero gaps between adjacent microlenses, but is alsointended to more broadly encompass microlens arrays having substantiallyno gapping in areas between the microlenses. For example, a microlensarray having approximately 3% or less of its surface area being spacenot covered by a microlens (i.e., approximately 3% or less gaps), isconsidered substantially gapless and is within the scope of theinvention.

With reference to the figures, where like numerals represent likeelements, FIG. 1 illustrates a partial cross-sectional view of a portionof a semiconductor-based imager 134, such as a CMOS imager, constructedin accordance with an exemplary embodiment of the invention. The imager134 includes a substantially gapless microlens array 110 formed over acolor filter array 117 that is provided over an upper passivation layer160 of an imager. The substantially gapless microlens array 110 includesfirst, second and third microlenses 112B, 112G, 112R. The first, second,and third microlenses 112B, 112G, 112R each correspond to a first,second, and third color. For example, the first, second, and thirdmicrolenses 112B, 112G, 112R could each correspond to pixel cells 130having a shared pixel cell architecture (discussed further below withrespect to FIG. 2), formed in association with a substrate 132, havingblue, green, and red color filters 117B, 117G, 117R formed between themicrolens array 110 and the pixel cells 130.

The imager 134 includes other material layers which may beconventionally employed between the photosensors 128B, 128G, 128R andcolor filters 117B, 117G, 117R. The additional material layers areillustrated as first, second, third, fourth, and fifth interlayerdielectrics 170, 172, 174, 176, 178. The passivation layer 160 is formedover the fifth interlayer dielectric, and is typically planarized tocreate a substantially flat surface. The passivation layer 160 can beplanarized by chemical mechanical polishing. The passivation layer 160is typically formed of silicon nitride.

The FIG. 1 imager 134 includes a microlens array 110 having overlappingand substantially gapless first, second, and third microlenses 1121B,112G, 112R. By forming overlapping microlenses e.g., second microlens112G overlaps the third microlens 112R, the path that photon radiation190 travels can be tailored to compensate for the shared pixel cellarchitecture and non-uniform photosensor spacing of the underlyingphotosensors 128B, 128G, 128R. For example, as illustrated in FIGS. 1and 2, the distance between a blue photosensor 128B and a greenphotosensor 128G is a distance D1; whereas the distance between thegreen photosensor 128G and the red photosensor 128R is a distance D2. Asillustrated, the distance D1 is greater than the distance D2;accordingly the photosensor 128G is shifted further to the rightrelative to the blue photosensor 128B. Accordingly, the correspondingmicrolens (e.g., second rnicrolens 112G) is formed such that photoradiation striking a top surface of the microlens at an orthogonal angle(i.e., 90°) does not strike the photosensor in an orthogonal angle(i.e., 90°) after passing through the shifted microlens (e.g., secondmicrolens 112G), as illustrated in FIG. 1.

FIG. 2 illustrates a top-down magnified portion of eight pixel cells 130arranged as four two-way shared pixel cells. As illustrated, twoadjacent pixel cells 130 in one row (e.g., Row A) of the array sharecommon pixel components. In addition, each pixel cell 130 has anindividual photosensor 128. The photosensors 128 may be anyphotosensitive structure for converting light photons into electrons(photo-charges). For a CMOS imager, each pixel cell 130 may have arespective transfer gate 102 as part of a respective transfertransistors for transferring the accumulated photo-charges from thephotosensors 128 to a common storage node, shown as floating diffusionregion 410.

Preferably, the transfer gates 102 are angled from the photosensors 128.For example, the longitudinal extent L′ of the transfer gates 102 isillustrated as being slanted with respect to the length L and the widthW of the associated photosensors 128. The angular geometry of thetransfer gate 102 allows for an efficient layout of the length L′ andwidth W′ of the transfer gate 102, which may improve the leakage and lagperformance of the pixel 130. In addition, the angular layout is alsobeneficial in maximizing the fill factor of the pixel cell array 110(FIG. 1), by maximizing the area of the photosensor 128 for each pixelcell 130.

The remaining pixel cell read out components shared between the adjacentpixel cells 130 are illustrated as being on a shared trunk 490, which islocated between two column-adjacent pixel cells of a row, and alsobetween pairs of row adjacent pixel cells of a row (e.g., Row B). Theshared components on the trunk 490 include a floating diffusion region410, which serves as a common storage node for the pixel cells 130receiving charges from photosensors 128 by the transfer gates 102. Areset transistor having a gate 407 is located on a side of the floatingdiffusion region 410 opposite the photosensors 128. A source/drainregion 406 is located on a second side of the reset transistor gate 407,which is capable of receiving a supply voltage V_(aa-pix). The floatingdiffusion region 410 is also electrically connected to the gate 409 of asource follower transistor, which has a drain coupled to the supplyvoltage V_(aa-pix). The source follower transistor creates a voltageoutput signal based on stored charge on the floating diffusion region410. A row select transistor having a gate 411 has a source/drainconnected to the source of the source follower transistor, forselectively reading out the pixel signal to a column line 420.

The FIG. 2 photosensors 128 are provided with microlenses (e.g., first,second, and third microlenses 112B, 112G, 112R of FIG. 1) that areshifted to accommodate the shared pixel cell (e.g., 130) layout. Asillustrated in FIGS. 1 and 2, two adjacent shared pixel cells 130 arecloser in proximity (illustrated as D2) than are two adjacent non-sharedpixel cells 130 (illustrated as D1); accordingly, the microlenses mustbe formed in closer proximity to one another, and may overlap such thatthe focal points of the microlenses are on the photosensors 128 of eachpixel cell 130.

Although FIG. 1 illustrates the first and third microlenses 112B, 112Rhaving a radius (r) substantially similar to one another, and differentfrom the second microlens 112G, it is not intended to be limiting in anyway. For example, the first, second, and third microlenses 1122B, 112G,112R could have substantially different radii from one another, eachtailored to the specific color that each microlens is intended totransmit. Similarly the first, second, and third microlenses 112B, 112G,112R could have substantially similar or substantially differentthicknesses, each tailored to the specific color that each microlens isintended to transmit.

FIGS. 3-6 illustrate a top-down view of an exemplary embodiment offabricating the FIG. 1 imager 134. As illustrated in FIG. 3, a firstmicrolens precursor 12B is selectively deposited and patterned over anarray of pixel cells 130, e.g., a pixel cell 130 having a color filter117B (FIG. 1) corresponding to a first color; e.g., blue light, formedbetween the first microlens 112B (FIG. 1) and the pixel cell 130. Thefirst microlens precursor 12B should be aligned with each photosensor ofthe pixel cell array. Although each of the first microlens precursors12B is illustrated as having a substantially rectangular configurationand each being substantially equal in size with the others, it is notintended to be limiting in any way. For example, each of the firstmicrolens precursors 12B could be formed to have other shapes and besubstantially different in size from one another.

FIG. 4 illustrates a plurality of first microlenses 112B formed from amaterial that flows into a solidly, cross-linked polymer, upon reflow,and that is impervious to subsequent reflow processes. During a reflowprocess conducted under reflow conditions, the substantially rectangularconfiguration of the first microlens precursor 12B (FIG. 3) istransformed into the first microlens 112B, which has a somewhatrectangular configuration with rounded edges and a curved top. The firstmicrolenses 112B, which are transparent to photon radiation, will retaintheir shape even if a subsequent reflow process is performed.

As shown in FIG. 4, there are spaces S between the plurality of firstmicrolenses 112B. After patterning and reflowing the first microlensprecursor 12B (FIG. 3) to form the first solidly, cross-linked polymermicrolenses 112B, second microlens precursors are patterned and reflowedto form the second microlenses 112G for a second color, e.g., green, asillustrated in FIG. 5. The second microlens precursors are patterned ina substantially rectangular configuration, and positioned in some of thespaces S (FIG. 5) between the first microlenses 112B. Additionally,portions of the second microlenses 112G can be formed overlapping thefirst microlenses 112B, as discussed above with respect to FIG. 1. Itshould be noted that the second reflow process may be conducted underdifferent conditions than the first reflow process, if needed.

As illustrated in FIG. 5, there are additional spaces S between thefirst and second microlenses 112B, 112G, where third microlensprecursors are patterned and reflowed to form the third microlenses 112Rfor a third color, e.g., red, as illustrated in FIG. 6. The thirdmicrolens precursors are patterned in a substantially rectangularconfiguration, and positioned in some of the spaces S (FIG. 5) betweenthe first and second microlenses 112B, 112G. Additionally, portions ofthe third microlenses 112R can be formed overlapping the first andsecond microlenses 112B, 112G, as discussed above with respect to FIG.1.

Although the second microlenses 112G are illustrated as being formedsimultaneously, it is not intended to be limiting in any way. Forexample, the second microlenses 112G formed between two firstmicrolenses 112B could be formed prior to second microlenses 112G formedbetween two third microlenses 112R. Similarly, the order of forming thefirst, second, and third microlenses 112B, 112G, 112R is not limited bythe above-described exemplary embodiment; rather, the first, second, andthird microlenses 112B, 112G, 112R can be formed in any order.

By forming the first, second, and third microlenses 112B, 112G, 112R inseparate steps, the microlenses 112B, 112G, 112R can be formed such thateach microlens has a focal point that is directed to a correspondingphotosensor 128 (FIG. 1). The angle, volume, material, and dimensions ofthe microlenses 112B, 112G, 112R can be manipulated to ensure that photoradiation 190 is directed to the photosensor 128 of the underlying pixelcell 130. In addition, the microlenses 112B, 112G, 112R can be formed tohave substantially different focal lengths. For example, as is know inthe art, different wavelengths of light are absorbed at different depthsof the silicon substrate. Therefore, by forming first, second, and thirdmicrolenses 112B, 112G, 112R in separate steps, the focal lengths andfocal points can be tailored to each individual wavelength the microlensis intended to transmit.

Although the FIG. 6 imager 134 illustrates sixteen microlenses in themicrolens array 110, the array 110 could contain millions of microlensesformed over millions of pixel cells 130 depending upon the resolution ofthe imager 134.

An example of reflow conditions are described next. The shape of themicrolenses after being subjected to reflow conditions is defined byseveral factors, including the thickness and type of material used toform the microlenses, the reflow temperature profile, and anypretreatment of the material that changes its glass transitiontemperature T_(g). Examples of pretreatments that affect reflow includeultraviolet light exposure or preheating the material to a temperaturebelow the glass transition temperature T_(g). An example of reflowconditions for first microlenses 112B may include providing a pluralityof first microlens precursors 12B (FIG. 3) at a first thickness and froma first type of material, exposing the first microlens precursors 12B(FIG. 3) with an ultraviolet light flood exposure of a specific dose,and reflowing at a first temperature ramp rate, followed by a cure.Reflow conditions for second microlenses 112G may include providingsecond microlens precursors of a second type of material at a secondthickness and reflowing the second microlens precursors with the firsttemperature ramp rate, followed by a cure. Reflow conditions for thirdmicrolenses 112 _(R) may include providing a third microlens precursorsof a third type of material and of a third thickness, pre-heating thematerial to a temperature below the transition glass temperature T_(g)of the third microlens precursors for a set period of time, and thenreflowing at a second temperature ramp rate, followed by a cure.

FIG. 7 illustrates a flow diagram describing an exemplary process forforming the microlens array 110 (FIG. 6). At step 250, the firstmicrolens precursor 12B (FIG. 3) is patterned on to the color filterarray 117 (FIG. 1). The patterning, as described above, can be acheckerboard pattern, which includes spaces between portions of thefirst microlens precursor 12B (FIG. 3). A single reticle may be used toprepare each of the first microlens precursor 12B (FIG. 3) patterns. Inthe patterning step, a thin film of microlens material of a firstthickness is coated on the substrate, the material is exposed using asuitable mask, and it is developed to either dissolve the exposedmicrolens material (positive resist) or dissolve the unexposedmircrolens material (negative resist). At step 255, the first microlensprecursor 12B (FIG. 3) is reflowed. Reflowing of the first microlensprecursor 12B (FIG. 3) turns the material into the first microlenses112B (FIG. 4). At step 260, the first microlenses 112B (FIG. 4) arecured, thus forming a checkerboard pattern of solidly, cross-linkedfirst microlenses 112B (FIG. 4).

At step 265, the second microlens precursors are patterned on to thecolor filter array 117 (FIG. 3) in some of the spaces between the firstmicrolenses 112B (FIG. 4). A single reticle may be used to prepare eachof the second microlens precursors depositions. If the second microlensprecursors patterns are of the same size as the first microlensprecursor 12B (FIG. 3), the same reticle used for the first microlensprecursor 12B (FIG. 3) patterns may be used for the pattern of thesecond microlens precursors. To create the pattern of the secondmicrolens precursors, the reticle is shifted.

At step 270, the second microlens precursors may be reflowed to form thesecond microlenses 112G (e.g., FIG. 5). The reflow conditions for thesecond microlens precursors may be different or the same as the reflowconditions for the first microlens precursors, depending on theapplication. For example, the reflow conditions for the second microlensprecursors could entail varying the exposure and/or the dose ofbleaching or the baking step temperature. By using different reflowconditions, the first microlenses 112B (e.g., FIG. 5) and secondmicrolenses 112G (e.g., FIG. 5) can be formed having same or differentfocal lengths. At step 275, a second cure process is performed.

At step 280, third microlens precursors are patterned in remaining openspaces between the first and second microlenses 112B, 112G (e.g., FIG.5). At step 285, the third microlens precursors may be reflowed at areflow condition to form the third microlenses 112R (e.g., FIG. 6). Thereflow conditions used to form the third microlenses 112R may bedifferent or the same as the conditions used to form the first andsecond microlenses, for example, by varying the doses of exposing and/orbleaching or the baking step temperature. By using different reflowconditions, the third microlenses 112R (e.g., FIG. 6) can be formed suchthat their focal lengths are the same as or different from than thefocal lengths of the first and second microlenses 112B, 112G, (e.g.,FIG. 6). At step 290, a third cure process is performed.

The advantages of forming the first, second, and third microlenses 112B,112G, 112R in separate steps include the potential to tailor eachmicrolens to the specific color the microlenses are intended totransmit, and to better align the first, second, and third microlenses112B, 112G, 112R with the photosensors 128 of the shared pixel cellarray 110.

Although the exemplary embodiment of the invention has been describedfor two-way shared pixel cells (e.g., 130 (FIG. 2), the invention hasbroader applicability to other shared pixel cell architectures. Forexample, FIG. 8 illustrates a top-down portion of a four-way sharedpixel cell array 550, which may employ the invention. In the FIG. 8array, pixel cells have a non-uniform spacing throughout the array dueto the shared read out architecture and the photosensors are also ofirregular shape.

As illustrated, the pixel cell array 550 has a plurality of pixel cellsthat are four-way shared pixel cells, each having respectivephotosensors 501, 502, 503, 504. The illustrated pixel cells have ashared architecture shown by dotted lines area 710 in FIG. 8. The sharedarchitecture includes a linearly-extending trunk located within the areabetween the pair of photosensors 501, 503 and the pair of photosensors502, and 504.

Each pixel cell has a transfer transistor having an associated gate 505,506, 507, 508. At least a portion of the transfer transistor gates 505,506, 507, 508 are preferably at an angle 481 with respect to thephotosensors 501, 502, 503, 504 as illustrated in FIG. 8. It should alsobe noted that the transfer transistor gates 505, 506, 507, 508 of thisembodiment are being shared, each among two adjacent pixels in a row.For example, column adjacent pixel photosensors 501 and 521 in the samerow each share the transfer gate 505 and column adjacent pixels 503, 523in the same row share the transfer transistor gate 507. The twoillustrated pixels (having associated photosensors 501, 521) that sharea transfer transistor gate (505), however, do not share a floatingdiffusion region or readout circuit. Rather, this embodiment has two rowadjacent pixels having photosensors 501 and 502 sharing a first floatingdiffusion region 510, and two row adjacent photosensors and 503, 504sharing a second floating diffusion region 520. The two floatingdiffusion regions 510, 520 are electrically connected to one another andto one electrode of an associated capacitor 518 through a firstmetallization layer formed above the surface of the pixel array 550.Each capacitor 518 is connected at another side (not shown) to a contactreceiving a source voltage, e.g., Vaa-pix, at source/drain region 513through a second metallization layer.

One reset transistor gate 512 is utilized for resetting the charges atboth floating diffusion regions 510, 520 and the associated capacitor518. To one side of the reset gate 512 is a source/drain region 513 thatis capable of receiving a supply voltage V_(aa-pix). The four pixelcells having associated photosensors 501, 502, 503, 504 share a commonreadout circuit that includes a source follower transistor having a gate514 and a row select transistor having a gate 516. The four pixels alsoshare the capacitor 518, which can increase the storage capacity of thetwo associated floating diffusion regions 510, 520.

The four-way shared pixel layout described herein illustratively has twocolumn-adjacent pixels having respective photosensors 501, 502 and twocolumn-adjacent pixels having respective photosensors 503, 504 sharingone set of readout circuitry 710. Thus, a column output line 711 is onlynecessary, in accordance with this exemplary embodiment, for every othercolumn. Additionally, because two row-adjacent pixels share a commontransfer gate signal, two column adjacent pixels in adjacent rows willbe read onto the same output line 711 at nearly the same time. Therespective signals from these pixels needs to be separately handled inorder to maintain maximum resolution for the pixel array 550.

The illustrated 4-way shared pixel array configuration has at least twodistinct advantages: it allows for larger pitch circuits in theperiphery in the column direction and it reduces the metallizationlayers needed in the layers above the surface of the pixel array 550while increasing the photosensitive area and thus quantum efficiencyover the conventional pixel array. In addition, each capacitor 518 isefficiently located at the comers of four photosensors, such as shown atthe clipped edges 711 of photosensors 502, 504. This location allows fora maximized capacitor area without sacrificing photosensitive area, orthereby decreasing the fill factor of the pixels array 550.

The proximity of the photosensors 501, 502, 503, 504, however, demandsthat the microlenses are formed in close proximity as well. By utilizingthe method discussed above with respect to FIGS. 3-7 (i.e., formingfirst, second, and third microlenses in separate steps), the microlensesformed over the photosensors 501, 502, 503, 504 can be formed such thatthe focal points of each of the microlenses corresponds to a respectivephotosensor. As discussed above with respect to FIG. 1, the microlensescould be formed to overlap such that the corresponding focal length ofthe microlens may be shifted to accommodate the proximity of the FIG. 8photosensors 501, 502, 503, 504.

FIG. 9 illustrates an imaging device 608 incorporating an imager 134,234 constructed in accordance with exemplary embodiments of theinvention. For the sake of clarity, the imaging device 608 will bedescribed as including the FIGS. 1-6 imager 134.

In operation of the FIG. 9 imaging device 608, the pixel cells 130 ofeach row in the imager 134 are all turned on at the same time by a rowselect line, and the pixel cells 130 of each column are selectivelyoutput by respective column select lines. A plurality of row and columnlines are provided for the entire array 110. The row lines areselectively activated in sequence by the row driver 610 in response torow address decoder 620 and the column select lines are selectivelyactivated in sequence for each row activation by the column driver 660in response to column address decoder 670. Thus, a row and columnaddress is provided for each pixel cell 130. The imaging device 608 isoperated by the control circuit 650, which controls address decoders620, 670 for selecting the appropriate row and column lines for pixelreadout, and row and column driver circuitry 610, 660, which applydriving voltage to the drive transistors of the selected row and columnlines.

The pixel output signals typically include a pixel reset signal V_(rst)taken off of the floating diffusion region (via the source followertransistor) when it is reset and a pixel image signal V_(sig), which istaken off the floating diffusion region (via the source followertransistor) after charges generated by an image are transferred to it.The V_(rst) and V_(sig) signals are read by a sample and hold circuit661 and are subtracted by a differential amplifier 662, which produces adifference signal (V_(rst)−V_(sig)) for each pixel cell 130, whichrepresents the amount of light impinging on the pixel cell 130. Thissignal difference is digitized by an analog-to-digital converter (ADC)675. The digitized pixel signals are then fed to an image processor 680to form a digital image output. In addition, as depicted in FIG. 9, theimaging device 608 may be included on a single semiconductor chip (e.g.,chip substrate 600).

FIG. 10 shows a system 900, a typical processor system modified toinclude an imaging device (such as the FIG. 9 imaging device 608) of theinvention. The processor system 900 is exemplary of a system havingdigital circuits that could include image sensor devices. Without beinglimiting, such a system could include a computer system, camera system,scanner, machine vision, vehicle navigation, video phone, surveillancesystem, auto focus system, star tracker system, motion detection system,image stabilization system, and other systems employing an imager.

System 900, for example a camera system, generally comprises a centralprocessing unit (CPU) 902, such as a microprocessor, that communicateswith an input/output (I/O) device 906 over a bus 904. CMOS imager device608 also communicates with the CPU 902 over the bus 904. Theprocessor-based system 900 also includes random access memory (RAM) 910,and can include removable memory 914, such as flash memory, which alsocommunicate with the CPU 902 over the bus 904. The imaging device 608may be combined with a processor, such as a CPU, digital signalprocessor, or microprocessor, with or without memory storage on a singleintegrated circuit or on a different chip than the processor.

It should again be noted that although the invention has been describedwith specific references to CMOS imaging devices (e.g., 134, 234 ofFIGS. 1-6 and 8), the invention has broader applicability and may beused in any imaging apparatus. For example, the invention may be used inconjunction with charge coupled device (CCD) imagers. The abovedescription and drawings illustrate preferred embodiments which achievethe objects, features, and advantages of the invention. Although certainadvantages and preferred embodiments have been described above, thoseskilled in the art will recognize that substitutions, additions,deletions, modifications and/or other changes may be made withoutdeparting from the spirit or scope of the invention. Accordingly, theinvention is not limited by the foregoing description but is onlylimited by the scope of the appended claims.

1-29. (canceled)
 30. An imaging device, comprising: an imager having apixel cell array arranged in a plurality of rows and columns, the pixelcell array comprising: at least first, second, and third pixel cellshaving corresponding first, second, and third photosensors, the firstand second photosensors having a first distance between each other, andthe second and third photosensors having a second distance between eachother, the first and second distances being different from one another,and a substantially gapless microlens array formed over the pixel cellarray, the microlens array having at least first, second, and thirdmicrolenses having a focal point corresponding to the first and secondphotosensors of the pixel cell array such that photo radiation strikinga top surface of at least one microlens at an orthogonal angle does notstrike the corresponding photosensor at an orthogonal angle afterpassing through the at least one microlens, and a plurality of row andcolumn lines coupled to the pixel cell array; and readout circuitrycoupled to the plurality of row and column lines.
 31. The imaging deviceof claim 30, further comprising a color filter array between the pixelcell array and the microlens array.
 32. The imaging device of claim 31,wherein the color filter array comprises at least first, second, andthird color filters.
 33. The imaging device of claim 32, wherein thefirst, second, and third color filters correspond to blue, green, andred color filters.
 34. The imaging device of claim 30, wherein eachmicrolens of the microlens array has a focal plane that is substantiallythe same.
 35. The imaging device of claim 30, wherein at least onemicrolens of the microlens array has a focal plane that is differentfrom other microlenses of the array.
 36. The imaging device of claim 30,wherein the first distance is greater than the second distance.
 37. Theimaging device of claim 30, farther comprising fourth and fifth pixelcells having fourth and fifth photosensors, and wherein a common storagenode is shared by at least two of the first, second, and thirdphotosensors and the fourth and fifth photosensor.
 38. A method offorming a pixel cell array, comprising: forming an array of photosensorshaving at least one photosensor spaced unequally from surroundingphotosensors; forming a first set of microlens precursors having acheckerboard pattern over a substrate formed over the photosensors;reflowing and curing the first set of microlens precursors; forming asecond set of microlens precursors over the substrate; reflowing andcuring the second set of microlens precursors such that the first andsecond microlens precursors form a substantially gapless microlens arrayhaving at least first, second, and third microlenses having a focalpoint corresponding to first and second photosensors in the photosensorsarray.
 39. The method of claim 38, wherein the first and second set ofmicrolens precursors are reflowed under respective first and secondreflow conditions.
 40. The method of claim 39, wherein the first andsecond reflow conditions are the same.
 41. The method of claim 39,wherein the first reflow condition is selected to form first microlenseshaving a first focal length corresponding to a first wavelength of lightand the second reflow condition is selected to form second microlenseshaving a second focal length corresponding to a second wavelength oflight.
 42. The method of claim 41, wherein the first and secondwavelengths are different.
 43. The method of claim 38, furthercomprising: forming a third set of microlens precursors over thesubstrate; and reflowing and curing the third set of microlensprecursors.
 44. The method of claim 38, further comprising coupling atleast two of the photosensors to a common node.
 45. The method of claim38, wherein the first set of microlens precursors are formed by thesteps comprising: depositing a material layer over the substrate;exposing selected areas of the material layer to developing conditions;and removing the non-selected areas of the material layer.
 46. Animager, comprising: a pixel cell array arranged in a plurality of rowsand columns, the pixel cell array comprising: at least first, second,and third pixel cells having corresponding first, second, and thirdphotosensors, the first and second photosensors having a first distancebetween each other, and the second and third photosensors having asecond distance between each other, the first and second distances beingdifferent from one another, and a substantially gapless microlens arrayformed over the pixel cell array, the microlens array having at leastfirst, second, and third microlenses having first, second, and thirdfocal points at different depths of corresponding first, second, andthird, photosensors, each depth corresponding to first, second, anddifferent colors, and a plurality of row and column lines coupled to thepixel cell array; and readout circuitry coupled to the plurality of rowand column lines.
 47. The imager of claim 46, further comprising a colorfilter array between the pixel cell array and the microlens array. 48.The imager of claim 46, wherein the color filter array comprises atleast first, second, and third color filters.
 49. The imager of claim46, wherein the first, second, and third color filters correspond toblue, green, and red color filters.
 50. The imager of claim 46, whereinthe first distance is greater than the second distance.